TREATMENT APPARATUS AND OZONE GENERATOR FOR CUT AND REDUCTION OF HARMFUL WASTE MATTER, VOLATILE HARMFUL CHEMICAL SUBSTANCE, FLOATING PARTICULATE MATTER AND SOOT

摘要

PROBLEM TO BE SOLVED: To provide a plasma apparatus which is applicable not only to end-of-pipe countermeasure techniques but to implant countermeasure techniques.SOLUTION: A treatment apparatus includes: a microwave oscillator 17 for generating a specified microwave band; a microwave resonant cavity 18 for resonating the specified microwave band; microwave radiation means 19 of radiating microwaves into the microwave resonant cavity 18; and plasma ignition means 20 of generating a partial discharge in a gas in the microwave resonant cavity 18 to convert the gas into plasma. The microwave radiation means 19 has plasma ignition means of forming plasma so that an electric field is formed by microwaves, in the plasma generation region 21 based on the plasma ignition means 20.