| 摘要 |
PROBLEM TO BE SOLVED: To provide a process and apparatus useful for precision scoring which enables precision cutting of a sheet material such as a large-size glass substrate for LCD displays.SOLUTION: A process for splitting a sheet having a cutting width of 2000 mm or more, comprises the steps of: providing an elongated laser beam having a width W from 0.5 mm to 3 mm and a length L from 60 mm to 300 mm where the beam is intercepted by a surface of the sheet, an aspect ratio between the length L and the width W of at least 30, an energy distribution along the width W of the elongated laser beam in an S mode, and an energy distribution along the length having a flat-top-mode profile; moving the laser beam at a speed of at least 300 mm/second in a direction essentially parallel with the length L along the scoreline in an exposed area on the surface of the sheet; and splitting the sheet substantially linearly along the scoreline. |
