发明名称 IMPRINT MOLD AND IMPRINT METHOD
摘要 PROBLEM TO BE SOLVED: To provide an imprint mold capable of improving through-put.SOLUTION: An imprint mold is configured to hold a transfer material between the imprint mold and a base material, and transfer an irregular pattern onto the transfer material. The imprint mold has a transfer surface brought into contact with the transfer material, and linear groove parts formed on the transfer surface. An angle formed between a side wall part of each of the groove parts and the transfer surface is greater than 90° and not more than 96°.
申请公布号 JP2015221561(A) 申请公布日期 2015.12.10
申请号 JP20150092355 申请日期 2015.04.28
申请人 ASAHI GLASS CO LTD 发明人 OGAWA TOMOTAKA;TOMINAGA RYU
分类号 B29C33/38;B29C59/02;H01L21/027 主分类号 B29C33/38
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