| 发明名称 |
SENSOR HAVING PARTICLE BARRIER |
| 摘要 |
A sensor having a particle barrier is described. In an example, a sensor includes: first and second electrode sets respectively disposed upon a planar support surface and a proof mass that is compliantly displaceable along a first axis substantially parallel to the planar support surface; and a first barrier disposed on the planar support around the first electrode set having a height less than a gap between the planar support and the proof mass to mitigate particle migration into the first or second electrode set. |
| 申请公布号 |
US2015355223(A1) |
申请公布日期 |
2015.12.10 |
| 申请号 |
US201314763511 |
申请日期 |
2013.01.31 |
| 申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY L.P. |
发明人 |
Wu Jennifer;Alley Rodney L.;Walmsley Robert G.;Milligan Donald J. |
| 分类号 |
G01P15/125;G01P15/08 |
主分类号 |
G01P15/125 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A sensor, comprising:
first and second electrode sets respectively disposed upon a planar support surface and a proof mass that is compliantly displaceable along a first axis substantially parallel to the planar support surface; and a first barrier disposed on the planar support around the first electrode set having a height less than a gap between the planar support and the proof mass to mitigate particle migration into the first or second electrode sets. |
| 地址 |
Houston TX US |
