DETERMINING QUANTITATIVE THREE-DIMENSIONAL SURFACE TOPOGRAPHY FROM TWO-DIMENSIONAL MICROSCOPY IMAGES

摘要

Sets of displacements of corresponding points between a first image and a second and third image are determined. Directional components in two directions of each set of displacements are fitted to two respective fitting planes. From the directional components, the relative displacements, each indicating a difference between the displacement of corresponding points and a calculated displacement of corresponding points on the respective fitting plane are calculated. An orientation of a sample plane for each image and the angle and the axis of rotation of the sample plane is calculated by requiring that for at least two types of physical parameters, the value resulting from the first set of displacements is identical to the value resulting from the second set of displacements. Three-dimensional surface topography data are determined from the calculated orientations and the angle and axis of rotation of the sample plane and the first or second relative displacements.