| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid feeding method and liquid feeding device capable of suppressing bubbles when feeding a liquid.SOLUTION: A liquid feeding device includes:a preparation tank 2; a storage tank 3 disposed below the preparation tank 2;a first piping 11;a second piping 12; a third piping 13;a first valve 21;a second valve 22;and a control device. The control device opens an outlet of the preparation tank 2 while the first valve 21 is closed to fill the upstream side from the first valve 21 with a liquid. Also,the control device continuously opens the first valve 21 to the predetermined opening degree to pressurize the inside of the preparation tank 2 to the predetermined pressure so that the liquid is fed by pressure to the third piping 13 along the side wall of the second piping 12 and the air in the first piping 11, the second piping 21 and the third piping 13 to the preparation tank 2 side. And the first valve 21 is fully opened and the second valve 22 is opened on the condition that the first piping 11 to the third piping 13 are completely filled with the liquid and the pressure inside the preparation tank 2 reaches the predetermined pressure. |
