HOLDING MATERIAL FOR CONTAMINATION CONTROL ELEMENT, METHOD OF MANUFACTURING THE SAME, AND CONTAMINATION CONTROL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a holding material capable of sufficiently maintaining the function of holding a contamination control element within a contamination control device heated to a high temperature.SOLUTION: A holding material according to one aspect of the present invention, which is a mat-like holding material having an inorganic fiber material, includes a surface layer that has inorganic colloid particles, and an internal region that is impregnated with the inorganic colloid particles and an organic binder and that is positioned on the inside with respect to the surface layer. In the surface layer, the inorganic colloid particles exist in higher concentrations than in the internal region. The amount of the inorganic colloid particles in the internal region is in the range of 1-10 mass% on the basis of the total mass of the holding material.