发明名称 SOLID VAPORIZER
摘要 PROBLEM TO BE SOLVED: To realize the needs that, since dangerous gases, like hydrogen and silanes, are not available because of their costs of storage and transportation and practicality, a gas allowing use-point use is expected to be produced from a solid raw material, stably at low costs with good reproducibility by means of an apparatus of a simple structure.SOLUTION: A heated gas generator which produces a heated gas instantaneously is already available. When the high-temperature gas produced by the generator is blown to a raw material solid, the raw material solid reacts to generate a gas containing elements of the raw material. Ingredients possibly causing clogging of piping with low vapor pressure can be removed by bringing a second heated gas into contact with the produced gas to proceed the reaction further. A solid vaporizer of this structure enables production of a gas containing solid elements stably. Since hydrogen can be produced easily from organic materials by it, the solid vaporizer is also applicable to extraction of biomass energy.
申请公布号 JP2015221936(A) 申请公布日期 2015.12.10
申请号 JP20150000671 申请日期 2015.01.06
申请人 PHILTECH INC 发明人 FURUMURA YUJI;SHIMIZU NORIYOSHI;MURA NAOMI;NISHIHARA SHINJI
分类号 C23C16/448;C30B25/14;F23G5/027;H01L21/205 主分类号 C23C16/448
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