| 发明名称 |
SUBSTRATE |
| 摘要 |
A substrate having a dielectric film thereon, in which: the dielectric film comprises at least four stacked layers of a dielectric material; the stacked layers comprise compressive layers which are subject to a compressive stress, and tensile layers which are subject to a tensile stress; and there are at least two spaced apart tensile layers which are each adjacent to one or more compressive layers. |
| 申请公布号 |
US2015357398(A1) |
申请公布日期 |
2015.12.10 |
| 申请号 |
US201514733559 |
申请日期 |
2015.06.08 |
| 申请人 |
SPTS TECHNOLOGIES LIMITED |
发明人 |
CROOK KATHERINE;BURGESS STEPHEN R |
| 分类号 |
H01L49/02;H01L21/02 |
主分类号 |
H01L49/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate having a dielectric film thereon, in which: the dielectric film comprises at least four stacked layers of a dielectric material; the stacked layers comprise compressive layers which are subject to a compressive stress, and tensile layers which are subject to a tensile stress; and there are at least two spaced apart tensile layers which are each adjacent to one or more compressive layers. |
| 地址 |
NEWPORT GB |
