| 发明名称 |
SUBSTRATE TEMPERATURE CONTROL APPARATUS INCLUDING OPTICAL FIBER HEATING, SUBSTRATE TEMPERATURE CONTROL SYSTEMS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHODS |
| 摘要 |
Substrate temperature control apparatus including optical fiber temperature control are described. Substrate temperature control apparatus includes a base, a thermal contact member proximate to the base, and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and thermal contact member. Substrate temperature control systems and electronic device processing systems and methods including optical fiber temperature control are described, as are numerous other aspects. |
| 申请公布号 |
US2015357228(A1) |
申请公布日期 |
2015.12.10 |
| 申请号 |
US201414299850 |
申请日期 |
2014.06.09 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
Busche Matthew;Boyd, JR. Wendell;Parkhe Vijay D.;Rice Michael R.;Volfovski Leon |
| 分类号 |
H01L21/687;H01L21/67 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate temperature control apparatus, comprising:
a base; a thermal contact member proximate to the base; and a plurality of optical fibers adapted to provide light-based heating extending laterally between the base and the thermal contact member. |
| 地址 |
Santa Clara CA US |
