DIELECTRIC BARRIER DISCHARGE REACTOR FOR HIGH SPEED SURFACE TREATMENT

摘要

Provided is a dielectric barrier discharge reactor which is suitable for high speed surface treatment. The dielectric barrier discharge reactor comprises: a first electrode which receives first voltage; two second electrodes which are located on the left and right of the first electrode and receive second voltage; and an earth electrode which is located under the first and second electrodes and supports a substrate to be processed. The first and second electrodes are surrounded by each dielectric. The first and second voltages have different polarities and are changed according to the time. The width of the first electrode is bigger than the width of each second electrode. Therefore, the present invention improves the surface treatment efficiency of a substrate to be processed by generating uniform plasma discharge while increasing the intensity of the discharge.