发明名称 |
CONTACTS FOR AN N-TYPE GALLIUM AND NITROGEN SUBSTRATE FOR OPTICAL DEVICES |
摘要 |
A method for fabricating LED devices. The method includes providing a gallium and nitrogen containing substrate member (e.g., GaN) comprising a backside surface and a front side surface. The method includes subjecting the backside surface to a polishing process, causing a backside surface to be characterized by a surface roughness, subjecting the backside surface to an anisotropic etching process exposing various crystal planes to form a plurality of pyramid-like structures distributed spatially in a non-periodic manner on the backside surface, treating the backside surface comprising the plurality of pyramid-like structures, to a plasma species, and subjecting the backside surface to a surface treatment. The method further includes forming a contact material comprising an aluminum bearing species or a titanium bearing species overlying the surface-treated backside to form a plurality of LED devices with the contact material. |
申请公布号 |
US2015357513(A1) |
申请公布日期 |
2015.12.10 |
申请号 |
US201514827709 |
申请日期 |
2015.08.17 |
申请人 |
SORAA, INC. |
发明人 |
CICH MICHAEL J.;THOMSON KENNETH JOHN |
分类号 |
H01L33/00;H01L33/22;H01L33/38 |
主分类号 |
H01L33/00 |
代理机构 |
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代理人 |
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主权项 |
1. A method for roughening a semiconductor structure comprising at least a III-Nitride material and having at least one nitrogen-face side having an initial roughness, said method comprising:
contacting said side with at least one mixture containing an acid and an alkali hydroxide, thereby roughening said side to a second roughness, said second roughness being rougher than said initial roughness. |
地址 |
FREMONT CA US |