MEMS STRUCTURE

摘要

An MEMS structure (1) has a support part (10) and a movable part (20), and the movable part (20) has a weight part (21), a frame-shaped part (22), a first torsion bar (23), and a second torsion bar (24). The frame-shaped part (22) is supported, on the -X direction end, by the first torsion bar (23) so as to be swingable in relation to the support part (10). The weight part (21) is swingably supported by the second torsion bar (24) on the end part of the frame-shaped part (22) on the + X direction side. A connection part (22A) of the frame part (22) is configured so as to be bendable in the Y direction. The weight part (21) is supported by the MEMS structure (1) so as to be movable in two directions, that is, the Z direction and the Y direction, and a single weight part (21) is provided with freedom in two directions.