| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device which prevents scattering of a cleaning fluid to the exterior without damaging devices and achieves low costs.SOLUTION: A cleaning device (1) includes: air exhaust means which is connected with a cleaning housing (3) below a cleaning table (5); and air curtain generation means (19, 21) which prevent a cleaning fluid from scattering from an opening (3a) of the cleaning housing. The air curtain generation means includes a first jet port (19a) and a second jet port which are disposed near the opening of the cleaning housing and jet air (A, B) from the opening into the cleaning housing in an oblique lower direction. The first jet port and the second jet port are located at positions sandwiching the cleaning table in plan view and jet the air in a direction that corresponds to a rotation direction (R) of the cleaning table. |
