LASER OUTPUT BEAM WAVEFRONT SPLITTER FOR BANDWIDTH SPECTRUM CONTROL

摘要

PROBLEM TO BE SOLVED: To provide light sources for integrated circuit lithography illumination sources requiring spectral processing within a pulse or from pulse to pulse within a burst.SOLUTION: An embodiment comprises: a dispersive bandwidth selection optic selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of a laser light pulse beam containing the individual pulse on the dispersive wavelength selection optic; and a tuning mechanism operative to select at least one angle of incidence of the laser light pulse beam containing the individual pulse upon the dispersive center wavelength selection optic, the tuning mechanism comprising a plurality of incidence angle selection elements each defining an angle of incidence for a different spatially separated but not temporally separated portion of the laser light pulse to return from the dispersive center wavelength selection optic a laser light pulse comprising a plurality of spatially separated but not temporally separated portions 116, 118, each portion having one of at least two different selected center wavelengths.