| 主权项 |
1. A monolithic filter ladder network comprising:
a plurality of single crystal acoustic resonator devices, numbered from R1 to N, where N is an integer greater than 1, configured on a common substrate member, each of the acoustic resonator device comprising:
a bulk substrate structure, having a surface region, and a thickness of material, the bulk substrate structure having a first recessed region and a second recessed region, and a support member disposed between the first recessed region and the second recessed region;a thickness of single crystal piezo material formed overlying the surface region, the thickness of single crystal piezo material having an exposed backside region configured with the first recessed region and a contact region configured with the second recessed region, the single crystal piezo material having a thickness of greater than 0.4 microns, the single crystal piezo material being characterized by a dislocation density of less than 1012 defects/cm2;a first electrode member formed overlying an upper portion of the thickness of single crystal piezo material;a second electrode member formed overlying a lower portion of the thickness of single crystal piezo material to sandwich the thickness of single crystal piezo material with the first electrode member and the second electrode member, the second electrode member extending from the lower portion that includes the exposed backside region to the contact region;a second electrode structure configured with the contact region;a first electrode structure configured with the first electrode member;a dielectric material overlying an upper surface region of a resulting structure overlying the bulk substrate member; andan acoustic reflector structure configured overlying the first electrode member, the upper portion, the lower portion, and the second electrode member. |
