GRAPHENE MANUFACTURING APPARATUS AND METHOD

摘要

A graphene manufacturing apparatus includes a gas supplying unit supplying a gas including carbon; a gas heating unit heating the gas supplied from the gas supplying unit; a deposition chamber in which a substrate having a catalyst layer is disposed; and an inlet pipe introducing the gas of the gas heating unit into the deposition chamber. A temperature of the deposition chamber is set at a temperature lower than a temperature of the gas heating unit so that a selection range with respect to a catalyst metal to be used in the catalyst layer may be expanded, and damage of the substrate due to a high temperature heat may be minimized.

主权项

1. A method of manufacturing graphene, the method comprising:
moving a substrate having a catalyst layer to a deposition chamber; supplying a gas comprising carbon to a gas chamber separately disposed from the deposition chamber; heating the gas to a temperature at which the carbon is separated from the gas; and introducing the gas heated in the gas chamber into the deposition chamber, and synthesizing graphene on the substrate.