MEMS STRUCTURE

摘要

This MEMS structure (1) is configured by a body portion (20) and a movable portion (30) being disposed, by way of an anchor (22) and the like formed on a substrate (2), above a z-direction detector electrode (10) that is fixed on the surface of the substrate (2). Because a movable weight (31) of the movable portion (30) is connected to an intermediate frame portion (32) by way of elastic supporting portions (33) that can elastically deform in the y-direction, the movable portion (30) can be relatively displaced in the Y-direction with respect to the body portion (20). In addition, because the intermediate frame portion (32) of the movable portion (30) is supported so as to be able to oscillate with respect to the body portion (20) by way of twisting deformation of a torsion bar (34) disposed at one end in the x-direction side, the movable portion (30) deforms in the z-direction integrally with the movable weight (31) and intermediate frame portion (32).