ELECTROSTATIC CHUCK AND SEMICONDUCTOR/LIQUID CRYSTAL MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To improve the reliability of connection between a feeding terminal and an electrode of a placement base in an electrostatic chuck.SOLUTION: An electrostatic chuck includes: a base plate 10 including a through hole 12; a placement base 30 which is disposed on the base plate 10 and includes an electrode E at a position corresponding to the through hole 12; a first cylindrical insulation component 40 which is disposed at the upper side of the through hole 12 of the base plate 10; a second cylindrical insulation component 50 disposed on the first cylindrical insulation component 40; a third cylindrical insulation component 60 which is disposed below the first cylindrical insulation component 40 and has an inner diameter smaller than an inner diameter of the first cylindrical insulation component 40; a connector 70 disposed in the through hole 12; a cylindrical member 76 included in the connector 70 and having an elastic body 76a therein; and a feeding terminal T included in the connector 70 and connected with the elastic body 76a. The feeding terminal T contacts with the electrode E of the placement base 30 in a state where the cylindrical member 76 of the connector 70 is fixed to the third cylindrical insulation component 60.