| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer position detecting device and the like for detecting the position of a wafer in a wafer having no notch.SOLUTION: In a position detecting device 2 for a wafer W, the wafer W in which a mark M for alignment composed of a plurality of dots is formed on the back side is mounted on a mounting table 21 and rotating mechanisms 22, 23 rotate the mounting table 21. A light irradiation mechanism 3 forms a light irradiation area in an area through which the mark M passes when the mounting table 21 is rotated. A line sensor 4 is disposed so that a light receiving area for receiving the reflected light of the light irradiated to the light irradiation area extends from the center toward the outside of the wafer W. Data processing units 5, 401 detect the direction of a wafer on the basis of the data in which the position of a rotation direction and the brightness obtained by the line sensor 4 are associated with each other when the wafer W is rotated by one turn. |
