OPTICAL ELEMENT WITH HIGH SCRATCH RESISTANCE

摘要

An optical element is provided that includes a substrate that is transparent in the visible spectral region and a multilayer anti-reflection coating on the substrate. The coating has alternating layers of layers having a first refractive index and of layers having a second, higher refractive index. The layers having the higher refractive index contain nitride or oxynitride and the layers having the first refractive index contain oxide of silicon and of at least one other element. The molar fraction of silicon in the layers having the first refractive index is predominant when compared to the molar fraction(s) of the other element or elements. The uppermost layer of the coating is a layer having the first refractive index. A layer of chain-form organofluoro molecules is disposed on the coating, wherein the molecules are bonded at the ends to the surface of the optical element.

主权项

1. An optical element with high scratch resistance, comprising:
a substrate that is transparent in the visible spectral region; a multilayer anti-reflection coating on the substrate, the multilayer anti-reflection coating having alternating layers of a first layer type having a first refractive index and layers of a second layer type having a second, higher refractive index, the layers of the second layer type comprising nitride or oxynitride, the layers of the first layer type comprising oxide of silicon and at least one other element, the first layer type having a molar fraction of silicon that is predominant when compared to a molar fraction of the at least one other element, wherein the multilayer anti-reflection coating has an uppermost layer that comprises the first layer type; and a layer of chain-form organofluoro molecules on the multilayer anti-reflection coating, the layer having molecules that are bonded at their ends to the uppermost layer of the multilayer anti-reflection coating.