发明名称
摘要 (Meth)acrylate compounds having a norbornane, bicyclo[2.2.2]octane, 7-oxanorbornane or cyclohexane ring structure and a gamma-butyrolactone ring structure connected together by a suitable linker are novel and useful in forming polymers having high transparency, especially at the exposure wavelength of an excimer laser.
申请公布号 JP3991191(B2) 申请公布日期 2007.10.17
申请号 JP20010179614 申请日期 2001.06.14
申请人 发明人
分类号 C08F20/28;G03F7/032;C07D307/33;C07D307/77;C07D307/94;C07D493/08;C07D493/20;G03F7/039;H01L21/027 主分类号 C08F20/28
代理机构 代理人
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