发明名称 |
Method of measurement accuracy improvement by control of pattern shrinkage |
摘要 |
A scanning method for a scanning electron microscope is provided which minimizes a degradation in dimension measuring accuracy caused by a shrink of a specimen. A time between the first and the second scan over the same location on the specimen is shortened by changing the scanning order of scan lines to enable the scanning to be performed successively while the shrink is small.
|
申请公布号 |
US7288763(B2) |
申请公布日期 |
2007.10.30 |
申请号 |
US20060405456 |
申请日期 |
2006.04.18 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
IKEDA SATOSHI;KAWADA HIROKI;KOBARU ATSUSHI |
分类号 |
H01J37/147;H01J37/28;G01N23/00;G01N23/225;G21K7/00;H01J37/256 |
主分类号 |
H01J37/147 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|