| 摘要 |
A high voltage generating device for oscillating a gas discharge laser is provided to minimize heat loss and high voltage loss and to reduce a rising time of high voltage output by dividing a secondary winding of a secondary high voltage side plurally. A high voltage generating for oscillating a gas discharge laser includes a square wave generating unit(110), a resonance circuit unit(120), a primary winding, a secondary winding(140), and a plurality of rectification diodes(D1-D16). The square wave generating unit generates a high frequency square wave. The resonance circuit unit is connected to the square wave generating unit and converts the high frequency square wave into a high frequency sine wave. The primary winding forms a time varying magnetic field by the sine wave applied from the resonance circuit. The secondary winding includes a plurality of division windings(L1-L7) connected in parallel to induce high voltage with a high frequency through magnetic coupling of the primary winding and a magnetic core. The plurality of rectification diodes are respectively connected to the plurality of division windings by a multi bridge to flow full wave rectification for rectifying both a positive semi-cycle and a negative semi-cycle of the sine wave in the division windings.
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