| 摘要 |
The present invention relates to a particle beam system comprising: a particle source; a first multi-aperture plate (351) with multiple openings (353) which includes particle beams formed on the downstream thereof; a second multi-aperture plate (359) with multiple openings (361) which are penetrated by the particle beams; an aperture plate (363) with an opening which is penetrated by all the particles which also penetrate the openings in the first and second multi-aperture plates; a third multi-aperture plate (355) with multiple openings (357) which are penetrated by the particle beams, and with multiple field generators (372) which respectively provide a dipole field or quadrupole field for a beam; and a controller (369) for feeding electric potentials to the multi-aperture plates and the aperture plate so that the second openings in the second multi-aperture plate respectively act as lenses on the particle beams (3), and feeding adjustable excitations to the field generators. |
