发明名称 METHOD, APPARATUS AND THE SYSTEM FOR DETECTING THICKNESS OF AN OBJECT
摘要 Disclosed is a method, an apparatus, and a system for determining a thickness of an object. The system for determining a thickness of an object, comprises: a light source which irradiates light having a suitable wavelength relative to a light absorption characteristic of an object to the object; a sensor disposed to face the light source and generates an image by photographing the object irradiated with a light irradiated from the light source; and the apparatus for determining the thickness of the object using the brightness of the generated image.
申请公布号 KR20150138007(A) 申请公布日期 2015.12.09
申请号 KR20150066730 申请日期 2015.05.13
申请人 SEMISYSCO CO., LTD. 发明人 LEE, SOON JONG;WOO, BONG JOO;WON, JUN YEON
分类号 G01B11/06;H01L21/66 主分类号 G01B11/06
代理机构 代理人
主权项
地址
您可能感兴趣的专利