发明名称 |
METHOD, APPARATUS AND THE SYSTEM FOR DETECTING THICKNESS OF AN OBJECT |
摘要 |
Disclosed is a method, an apparatus, and a system for determining a thickness of an object. The system for determining a thickness of an object, comprises: a light source which irradiates light having a suitable wavelength relative to a light absorption characteristic of an object to the object; a sensor disposed to face the light source and generates an image by photographing the object irradiated with a light irradiated from the light source; and the apparatus for determining the thickness of the object using the brightness of the generated image. |
申请公布号 |
KR20150138007(A) |
申请公布日期 |
2015.12.09 |
申请号 |
KR20150066730 |
申请日期 |
2015.05.13 |
申请人 |
SEMISYSCO CO., LTD. |
发明人 |
LEE, SOON JONG;WOO, BONG JOO;WON, JUN YEON |
分类号 |
G01B11/06;H01L21/66 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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