THERMAL EVAPORATION APPARATUS AND METHOD FOR IN LINE TYPE

摘要

Disclosed are a thermal evaporation apparatus of an in-line type and a method thereof. The thermal evaporation apparatus of an in-line type of the embodiment of the present invention includes: a first chamber which performs a process of depositing a deposition material on a substrate; a second chamber which is adjacent to the first chamber and performs a process of removing a deposition material deposited on the non-deposition region of a substrate; a substrate transfer unit which is prepared in the first and the second chamber, and sequentially transfer substrates to sequentially perform a deposition process on the substrates; and a sealing module which is arranged between the first and the second chamber, and selectively seals a substrate inlet between the first and the second chamber during the process of the first chamber and the second chamber.