| 摘要 |
The present invention provides efficiency enhancement equipment for multi-collecting and manufacturing nanopowder, which comprises: a chamber arranged with a stage mounted with a wafer inside; a reactor introduced with plasma forming gas and process gas to the inside, and installed on the upper end of the chamber so as to be connected to the inside of the chamber with a process area in which the volume is formed unevenly along the top and the bottom; a plasma antenna unit formed to surround an insulation tube, and formed with a magnetic field for forming a plasma; and a multi-collection unit detachably installed on multiple positions of a discharge pipe extended from the lower end of the chamber for collecting a certain amount of a particle. |
