发明名称 |
THIN FILM BATTERY AND MANUFACTURING METHOD |
摘要 |
In a method of fabricating a battery, a substrate is annealed to reduce surface contaminants or even water of crystallization from the substrate. A series of battery component films are deposited on a substrate, including an adhesion film, electrode films, and an electrolyte film. An adhesion film is deposited on the substrate and regions of the adhesion film are exposed to oxygen. An overlying stack of cathode films is deposited in successive deposition and annealing steps. |
申请公布号 |
WO2008108999(A2) |
申请公布日期 |
2008.09.12 |
申请号 |
WO2008US02740 |
申请日期 |
2008.02.28 |
申请人 |
FRONT EDGE TECHNOLOGY, INC.;KRASNOV, VICTOR;NIEH, KAI-WEI;LI, JIANCHAO |
发明人 |
KRASNOV, VICTOR;NIEH, KAI-WEI;LI, JIANCHAO |
分类号 |
C23C14/02;C23C14/58;H01M4/04;H01M4/139;H01M4/36;H01M4/66;H01M6/40;H01M10/04;H01M10/052;H01M10/0562;H01M10/0585;H01M10/36 |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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