| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the degradation in detection sensitivity of a physical quantity sensor due to an acceleration generated in a direction other than a detection axis.SOLUTION: The physical quantity sensor includes a first rocking body 300a and a second rocking body 300b, and the rocking bodies 300a and 300b are supported on a substrate by a first support 40a and a second support 40b, and the first rocking body 300a is divided into a first area PT1 and a second area PT2 by a first axis (support axis) Q1 in a plan view, and the second rocking body 300b is divided into a third area PT1 and a fourth area PT2 by a second axis (support axis) Q2 in a plan view. A mass of the second area PT2 is heavier than that of the first area, and a mass of the fourth area is heavier than that of the third area, and an arrangement direction of the first area and the second area and that of the third area and the fourth area are identical to each other, and the first rocking body 300a and the second rocking body 300b are inclined in directions opposite to each other in a state of receiving gravity.</p> |
