发明名称 加工装置
摘要 <p>The present invention provides a processing device, which can adjust the light quantity of a camera component to appropriate light quantity. The processing device includes: a chuck workbench for keeping objects to-be-processed; a processing component for processing the objects kept on the workbench; a camera component for recording the objects to-be-processed on the workbench; and a processing feed component for relatively processing and feeding the chuck workbench and the objects to-be-processed. The processing device is characterized in that the camera component includes: a light source, which is used for lighting the objects to-be-processed; a camera, which is used for recording the processed objects being lighted; and a light quantity regulator, which is used for adjusting the light quantity from the light source. The light quantity regulator includes: a rotating plate with a rotating axis; an open part, which is formed on the rotating plate and used for the light from the light source to pass through; and a light screen for making the light quantity of the open part change between the maximum value and the minimum value with the rotating angle corresponding to the rotating axis.</p>
申请公布号 JP5828683(B2) 申请公布日期 2015.12.09
申请号 JP20110127004 申请日期 2011.06.07
申请人 株式会社ディスコ 发明人 田中 誠;吉田 圭吾;山田 清
分类号 H01L21/301;B23K26/03 主分类号 H01L21/301
代理机构 代理人
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