| 摘要 |
An insert piece (340) is described for introducing between the mounting base (314) and the end-block (310) of a magnetron sputtering installation. Such an insert piece replicates (320', 322') on one end the end-block interface (322) and at the other end the mounting base interface(320). Inside the insert, transfer rods (342) and tubing (444,444') are provided for the transfer of coolant, electrical current and motive force between the mounting base (314) and the end-block (310). The insert piece (340) is useful to adjust the distance between the target and the substrate. An advantageous embodiment of the insert piece incorporates resilient means into it for accommodating small movements of the end-block caused by thermal expansion or sagging of the target tube. In another advantageous embodiment, the inserts are so long that they cross the plane of the substrate. In this way a target can conveniently be mounted to coat the side opposite to the normal coating side of the substrate without the need for extensive refurbishment of the installation.
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