Usage of Si-O-Si based molecules for high efficiency Si solar cells

摘要

Method for deposing on a substrate a microcrystalline silicon oxide layer of formula SiO x :H, where 0 < x < 2, comprising introducing into a deposition zone where the substrate is located a gas mixture comprising :
- a silicon precursor of (R 1 R 2 R 3 )Si-O-Si(R 4 R 5 R 6 ) where R 1 -R 6 are organic ligands independently selected from the group consisting of H, C1-C5 linear or branched, alkyl, aryl, alkenyl ; and
- monosilane, hydrogen and a doping source.