发明名称 Nonvolatile memory devices and methods of fabricating the same
摘要 A nonvolatile memory device includes a semiconductor substrate including a cell region and a peripheral circuit region, a cell gate on the cell region, and a peripheral circuit gate on the peripheral circuit region, wherein the cell gate includes a charge storage insulating layer on the semiconductor substrate, a gate electrode on the charge storage insulating layer, and a conductive layer on the gate electrode, and the peripheral circuit gate includes a gate insulating layer on the semiconductor substrate, a semiconductor layer on the gate insulating layer, an ohmic layer on the semiconductor layer, and the conductive layer on the ohmic layer.
申请公布号 US7547942(B2) 申请公布日期 2009.06.16
申请号 US20070709816 申请日期 2007.02.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JEON SANG-HUN;KANG CHANG-SEOK;CHOI JUNG-DAL;PARK JIN-TAEK;SOHN WOONG-HEE;JUNG WON-SEOK
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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