发明名称 DEVICE AND STRUCTURE FOR BULK FINFET TECHNOLOGY
摘要 A lateral double-diffused MOS (LDMOS) bulk finFET device for high-voltage operation includes a first-well region and two or more second-well regions formed on a substrate material and one or more non-well regions including substrate material. The non-well regions are configured to separate well regions of the second-well regions. A source structure is disposed on a first fin that is partially formed on the first-well region. A drain structure is disposed on a second fin that is formed on a last one of the second-well regions. One or more dummy regions are formed on the one or more non-well regions. The dummy regions are configured to provide additional depletion region flow paths including vertical flow paths for charge carriers to enable the high-voltage operation.
申请公布号 EP2953168(A1) 申请公布日期 2015.12.09
申请号 EP20150169215 申请日期 2015.05.26
申请人 BROADCOM CORPORATION 发明人 PONOTH, SHOM;ITO, AKIRA
分类号 H01L29/78;H01L29/66 主分类号 H01L29/78
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