发明名称 画像形成装置
摘要 PROBLEM TO BE SOLVED: To provide an image forming apparatus using a spatial light modulator to form a more clear and bright image by reducing crosstalk.SOLUTION: A plurality of image forming units 1 irradiates a surface of a workpiece W conveyed by a conveyance system 2 with light of a predetermined pattern. The image forming unit 1 forms an image by modulating light from a light source 11 with a spatial light modulator 4, such as a DMD, to form an image on the surface of the workpiece W by use of an imaging optical system 5. The imaging optical system 5 includes imaging lens groups 51, 52 arranged before and after a microlens array 7 having lens elements 71 corresponding to pixels 41a, 41b, 41c separated each other in the spatial light modulator 4. The first imaging lens group 51 is for enlargement, while the second imaging lens groups 52 is for reduction.
申请公布号 JP5831516(B2) 申请公布日期 2015.12.09
申请号 JP20130190461 申请日期 2013.09.13
申请人 ウシオ電機株式会社 发明人 川崎 裕生
分类号 G02B13/24;G02B26/08;G03F7/20;H01L21/027 主分类号 G02B13/24
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