发明名称 PHOTOSENSITIVE RESIN COMPOSITION, SAW FILTER AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition adaptable to solvent development, capable of low-temperature curing, having sufficiently low water absorption, excellent in wet heat resistance, and capable of image formation with good resolution in a thick film. <P>SOLUTION: The photosensitive resin composition includes (A) a polyamic acid having a 5-20C alkylene group in a main chain, (B) a polymerizable compound, and (C) a photopolymerization initiator, wherein the polymerizable compound (B) includes a polymerizable compound having a 6-20C linear or branched chain alkylene group and two or more ethylenically unsaturated groups per molecule. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010020107(A) 申请公布日期 2010.01.28
申请号 JP20080180651 申请日期 2008.07.10
申请人 HITACHI CHEM CO LTD 发明人 KATO SADAAKI;MATSUZAKA OSAMU
分类号 G03F7/027;G03F7/037;G03F7/40;H01L21/027 主分类号 G03F7/027
代理机构 代理人
主权项
地址