EPITAXIAL REACTOR COOLING METHOD AND REACTOR COOLED THEREBY

摘要

The invention relates to a method for cooling the walls of the reaction chamber ( 2 ) of a reactor for chemical vapour deposition. The method consists in selectively cooling with water at least one predetermined zone of the wall of the chamber ( 2 ), to remove a different heat flow compared with the adjacent zones so as to obtain substantially uniform temperature distribution of the reaction chamber ( 2 ). In a preferred embodiment, the selectively-cooled zone is the zone above the susceptor ( 5 ) and is delimited by two ribs ( 8, 9 ). The invention also includes a reactor and a reaction chamber ( 2 ) for carrying out the cooling method.