| 摘要 |
The present invention relates to an apparatus for inspecting a substrate using a concave reflector comprising a camera, a lighting device, a concave reflector, a linear movement unit, and a rotary movement unit. The camera photographs foreign substances contained in a substrate. The lighting device is coaxially installed in an optical axis of the camera, and radiates light toward the substrate. The concave reflector into which the light reflected from the substrate flows includes a supporting surface, a retro reflector, and a mirror reflector. The supporting surface is formed to be concave with respect to an incidence optical axis wherein light is coming in, the retro reflector is combined with the supporting surface according to a shape of the supporting surface and retro-reflects incidence light to the substrate, and the mirror reflector is combined with the supporting surface according to a shape of the supporting surface in one side of the retro reflector and reflects incidence light to the substrate. The linear movement unit linearly moves the concave reflector in a first direction crossing the incidence optical axis. The rotary movement unit rotatably moves the concave reflector around an incidence optical axis and a second direction crossing the first direction as the central axis of rotation. |
