PIEZOELECTRIC PUMP FOR MICROFLUID DEVICES

摘要

The present invention relates to a piezoelectric pump comprising: an elastic chamber part which has a fluid inlet where fluid is put and a fluid outlet to discharge the fluid; and a piezoelectric body part which is arranged on the outer surface of the elastic chamber part, wherein the elastic chamber part is formed in either a rectangular parallelepiped shape or in a cylindrical shape. The present invention enables easy manufacture by simplifying the structure thereof as a check valve for preventing a backflow is not required and improves the durability and reliability of the pump.