| 摘要 |
The present invention provides a method and an apparatus for separating an edged material of a brittle material substrate. A substrate is aligned in a longitudinal direction and in a transverse direction to form a functional area, and the edged material surrounding the substrate having scribe lines formed thereon is surely separated. The substrate (20) is kept on an edge material separating stage (15). The edged material separation stage (15) includes a chamber (52), a base plate (53) positioned on the chamber (52), and an elastic plate (54). The elastic plate (54) and the base plate (53) have a plurality of openings. The substrate (20) positioned on the upper surface of the elastic plate (54) is kept by introducing air through the openings of the elastic plate (54). A pusher plate (47) having a frame-shape where sides facing each other have different heights is moved downward in parallel with the surface of the substrate (20), thereby separating the edged material surrounding the substrate (20). |
