发明名称 光学特性測定装置及び光学特性測定方法
摘要 PROBLEM TO BE SOLVED: To provide an optical characteristic measuring apparatus capable of accelerating measurement.SOLUTION: In an optical characteristic measuring apparatus 1, a support unit 4 supports a sample S by being brought into contact with a plurality of mutually separated points on a lower surface of the plate-like sample S. A lifting unit 5 includes one or more holding heads 52 allowed to be moved to the supported sample S, brings the holding head 52 into contact with the vicinity of a measuring point of the sample S and generates contact pressure between the holding head 52 and the sample S. A light projection unit 6 irradiates the measuring point of the sample S with light in a state that the contact pressure is generated between the holding head 52 and the sample S. A light receiving unit 7 receives light transmitted through the measuring point of the sample S.
申请公布号 JP5939678(B2) 申请公布日期 2016.06.22
申请号 JP20120108023 申请日期 2012.05.09
申请人 大塚電子株式会社 发明人 銅田 知広;中村 賢司;村本 康典;横田 英昭
分类号 G01M11/00 主分类号 G01M11/00
代理机构 代理人
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