| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily prevent a film liquid discharged to a substrate from reaching a rear surface from an outer peripheral end of the substrate, accurately discharge the film liquid in a required position on the substrate, and ensure an accurate film thickness obtained on the substrate.SOLUTION: A length of an array width of nozzles 4 of an ink jet head 4 is made a maximum length or longer in a width direction of a film forming surface 2A of a substrate 2 in relatively moving the substrate 2, and the number of the nozzles 4 for discharging the film liquid of the plurality of nozzles 4 is variably controlled so as to stop adhesion of the discharged film liquid 6 at a boundary of the film forming surface 2A and an outer peripheral end part 2c of the substrate 2 to suppress the adhesion of the film liquid 6 from the outer peripheral end part 2b to a rear surface 2c side of the substrate 2 until the relative movement of both 2 and 2A is completed.</p> |
