| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent instantaneous total energy from exceeding a fixed value and to heighten a probability of suppressing generation of overshoot of temperature. <P>SOLUTION: A control device includes: a heat-up power amount prediction part 3 for predicting heat-up power amount PWi of each control loop Li; a heat-up execution order determination part 4 for determining that an order from a control loop of a large heat-up power amount PWi to a control loop of a small heat-up power amount is a heat-up execution order of the respective control loops Li; a heat-up target selection part 5 for selecting a control loop whose temperature is to be raised according to the heat-up execution order, when a first heat-up is started, or when it is determined that operation amount decreases and surplus of the power is generated, due to progress of the heat-up of the control loop whose temperature is to be raised; a power restriction operation part 6 for performing restriction operation of power to be supplied to a heater of each control loop Li; and a control part 7-i provided at each control loop Li. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
