| 摘要 |
PROBLEM TO BE SOLVED: To effectively harden a metal oxide film formed on a resin plate surface, and to use resin as a window material of a transport machine.SOLUTION: A method for hardening a metal oxide film includes a first step for forming a metal oxide film MO containing at least one metal selected from aluminum, titanium, zirconium, niobium and hafnium on a surface of a resin plate S, and a second step for intermittently irradiating an oxygen ion to the metal oxide film MO by an ion gun 3 in a treatment chamber 10 under reduced pressure. The method also includes a third step for exposing the metal oxide film MO to a plasma atmosphere P of inert gas in the treatment chamber 10 under the reduced pressure while the oxygen ion is not irradiated. |
