发明名称 フッ素化アルキルリン酸オニウム塩系酸発生剤
摘要 PROBLEM TO BE SOLVED: To provide an acid generator which is free from toxic metals, has cation polymerization performance or crosslinking reaction performance equivalent to that of SbFsalts, and never causes a problem such that the transparency of a cured product using the same is deteriorated after heat run test.SOLUTION: The acid generator is composed of a fluorinated alkyl phosphoric onium salt represented by general formula (1), the content of an alkali metal component in the onium salt being 100 ppm or less. [In formula (1), A represents an n-valent element of VIA group to VIIA group (CAS notation), n being 1 or 2; R1 is an organic group bonded to A, the number of R1 being n+1; and Rf represents alkyl in which 80% or more of hydrogen atoms is substituted by fluorine atoms, b indicating the number of the hydrogen atoms and being an integer of 1-5].
申请公布号 JP5828679(B2) 申请公布日期 2015.12.09
申请号 JP20110121560 申请日期 2011.05.31
申请人 サンアプロ株式会社 发明人 木村 秀基
分类号 C09K3/00;G03F7/004;G03F7/038;H01L21/027 主分类号 C09K3/00
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