| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a focusing technique able to prevent false focusing. <P>SOLUTION: A microscope device 1 changes an interval between a sample 6 and a CCD camera 13 within a predetermined search range by a Z axis drive part 14, thereby causing a contrast calculation part 3a to calculate an image contrast at each Z position from the image data of the sample 6 imaged by the CCD camera 13. When the ratio of the smallest value of the contrast to the largest value of the contrast calculated within the search range is equal to or smaller than a predetermined value, the microscope device 1 determines that a focusing position is present within the search range. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
