VACUUM PUMP

摘要

To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump. One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater 147 and a magnetic valve 163 is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.