| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently detect an alignment mark exposed from two V-grooves formed on an workpiece upon detecting the alignment mark and setting a planned work line by using the alignment mark as a reference. <P>SOLUTION: A cutting apparatus at least includes: an imaging means for capturing an image of the workpiece; a holding table for rotatably holding the workpiece; and a cutting blade for cutting the workpiece and constituted in such a way that the holding table and the cutting means are cut and fed relatively in a cutting feed direction and also indexed and fed relatively in an indexing feed direction perpendicular to the cutting feed direction. The imaging means is such a line sensor that imaging devices are arrayed in a line in the cutting feed direction and detects a cutting area of the workpiece by indexing and feeding the holding table and the imaging means relatively. Since the imaging means can detect the alignment mark of the two V-grooves formed in the indexing and feeding direction simultaneously, the productivity of cutting work can be improved. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
