发明名称 切削方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a cutting method capable of setting an appropriate margin width for each workpiece, and preventing a breakage of a cutting blade or a workpiece caused by a cutting blade's collision with a workpiece top face. <P>SOLUTION: In the cutting method, steps of lowering a cutting blade from a retreat position to a predetermined height position, which is a processing start position set at a processing start position setting step, starting a cutting feed, and stopping the cutting feed at a cutting stop position, are repeatedly executed. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5828744(B2) 申请公布日期 2015.12.09
申请号 JP20110251416 申请日期 2011.11.17
申请人 株式会社ディスコ 发明人 堤 義弘
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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